The MBF1003-3.7 C3 precision ball screw, with its high precision, miniaturization, and high responsiveness, is widely used in semiconductor manufacturing equipment, precision microscope stages, and medical automation instruments.
Specifications
Screw outer diameter: 10 mm
Lead: 3 mm
Ball center diameter: 10.3mm
Dynamic load rating: 3.9 kN
Static load rating: 7.2 kN
Nut outer diameter: 24 mm
Flange outer diameter: 44 mm
Nut total length L: 30 mm
Nut weight: 0.1 kg
Screw weight: 0.52 kg/m
THK MBF1003-3.7 C3 Precision Ball Screw Core Applications in Semiconductor Manufacturing Equipment
Wafer Bonders/Wire Bonders: The ball screw’s 3mm lead provides extremely high pulse resolution; C3-grade precision ensures ultra-high repeatability in chip pick-up and placement.
Wafer Inspection and Optical Microscope Stages: The C3 precision ground ball screw’s extremely low amplitude vibration and high smoothness prevent image blurring.
Miniature Robots and Precision Dispensers: Its extremely lightweight 10mm outer diameter significantly reduces the system inertia of multi-axis linkage systems.
Applications of the THK MBF1003-3.7 ball screw:
Semiconductor manufacturing equipment
Precision positioning platforms
Laboratory automation
Optical inspection systems
Compact CNC equipment
Customized Solutions Available
We support custom design and production according to your drawings. Customized dimensions, lead, shaft end machining, nut types, and other specifications are available upon request.
| THK MBF Ball Screw Model | |
| MBF0401-3.7 | MBF0601-3.7 |
| MBF0602-2.7 | MBF0602.5-2.7 |
| MBF0801.5-3.7 | MBF0802-3.7 |
| MBF0802.5-3.7 | MBF0803-2.7 |
| MBF0804-2.7 | MBF1001-3.7 |
| MBF1001.5-3.7 | MBF1002-3.7 |
| MBF1002.5-3.7 | MBF1003-3.7 |
| MBF1005-2.7 | MBF1202-3.7 |
| MBF1202.5-3.7 | MBF1203-3.7 |
| MBF1204-3.7 | MBF1402-3.7 |
| MBF1404-3.7 | |
Model No. |
Screw shaft outer diameterd |
Lead
Ph |
Ball center- to-center diameterdp |
Thread minor diameterdc |
No.of loaded circuitsRows X turns |
Basic load rating | Rigidity
K N/μm |
|
| Ca
kN |
Coa
kN |
|||||||
| MBF 0401-3.7 | 4 | 1 | 4.15 | 3.3 | 1×3.7 | 0.59 | 0.93 | 54 |
| MBF 0601-3.7 | 6 | 1 | 6.15 | 5.3 | 1×3.7 | 0.74 | 1.5 | 75 |
| MBF 0602-2.7 | 6 | 2 | 6.2 | 5.1 | 1×2.7 | 0.75 | 1.2 | 58 |
| MBF 0602.5-2.7 | 6 | 2.5 | 6.2 | 5.1 | 1×2.7 | 0.75 | 1.2 | 59 |
| MBF 0801.5-3.7 | 8 | 1.5 | 8.2 | 7.1 | 1×3.7 | 1.1 | 2.2 | 99 |
| MBF 0802-3.7 | 8 | 2 | 8.3 | 6.6 | 1×3.7 | 2.5 | 4.2 | 111 |
| MBF 0802.5-3.7 | 8 | 2.5 | 8.3 | 6.6 | 1×3.7 | 2.4 | 4.1 | 111 |
| MBF 0803-2.7 | 8 | 3 | 8.3 | 6.2 | 1×2.7 | 2.6 | 4.2 | 85 |
| MBF 0804-2.7 | 8 | 4 | 8.3 | 6.2 | 1×2.7 | 2.6 | 4.2 | 84 |
| MBF 1001-3.7 | 10 | 1 | 10.15 | 9.3 | 1×3.7 | 0.84 | 2 | 113 |
| MBF 1001.5-3.7 | 10 | 1.5 | 10.2 | 9.1 | 1×3.7 | 1.25 | 2.8 | 120 |
| MBF 1002-3.7 | 10 | 2 | 10.3 | 8.6 | 1×3.7 | 2.8 | 5.3 | 134 |
| MBF 1002.5-3.7 | 10 | 2.5 | 10.3 | 8.6 | 1×3.7 | 2.7 | 5.3 | 133 |
| MBF 1003-3.7 | 10 | 3 | 10.3 | 8.2 | 1×3.7 | 3.9 | 7.2 | 140 |
| MBF 1005-2.7 | 10 | 5 | 10.3 | 8.2 | 1×2.7 | 3 | 5.2 | 103 |
| MBF 1202-3.7 | 12 | 12.3 | 10.6 | 1×3.7 | 3 | 6.5 | 156 | |
| MBF 1202.5-3.7 | 12 | 2.5 | 12.3 | 10.6 | 1×3.7 | 3 | 6.4 | 156 |
| MBF 1203-3.7 | 12 | 3 | 12.3 | 10.2 | 1×3.7 | 4.3 | 8.7 | 162 |
| MBF 1204-3.7 | 12 | 4 | 12.3 | 9.8 | 1×3.7 | 5.4 | 10.2 | 165 |
| MBF 1402-3.7 | 14 | 2 | 14.3 | 12.6 | 1×3.7 | 3.3 | 7.5 | 176 |
| MBF 1404-3.7 | 14 | 4 | 14.3 | 11.8 | 1×3.7 | 5.7 | 11.1 | 187 |
Nut dimensions |
Screw shaft inertial moment/mm kg·m²/mm |
Nut
mass kg |
Shaft masskg/m |
||||||||||
| Outer diameterD |
Flange diameter D₁ |
Overall length L₁ |
H | B₁ | PCD | d₁ | d₂ | h | Nut type |
Tw | |||
| 11 | 24 | 18 | 4 | 14 | 17 | 3.4 | 6.5 | 2.5 | I | 13 | 1.97×10-10 | 0.02 | 0.07 |
| 13 | 30 | 21 | 5 | 16 | 21.5 | 3.4 | 6.5 | 3 | I | 17 | 9.99×10-10 | 0.04 | 0.14 |
| 15 | 29 | 17 | 4 | 13 | 23 | 3.4 | Ⅱ | 17 | 9.99×10-10 | 0.03 | 0.21 | ||
| 15 | 29 | 18 | 4 | 14 | 23 | 3.4 | Ⅱ | 17 | 9.99×10-10 | 0.03 | 0.21 | ||
| 16 | 30 | 19 | 4 | 15 | 24 | 3.4 | Ⅱ | 18 | 3.16×10-⁹ | 0.03 | 0.36 | ||
| 20 | 40 | 28 | 6 | 22 | 30 | 4.5 | 8 | 4 | I | 24 | 3.16×10-⁹ | 0.1 | 0.19 |
| 20 | 38 | 26 | 5 | 21 | 30 | 4.5 | Ⅱ | 22 | 3.16×10-⁹ | 0.07 | 0.34 | ||
| 20 | 38 | 25 | 5 | 20 | 30 | 4.5 | Ⅱ | 22 | 3.16×10-⁹ | 0.06 | 0.32 | ||
| 21 | 39 | 28 | 5 | 23 | 31 | 4.5 | Ⅱ | 23 | 3.16×10-⁹ | 0.08 | 0.34 | ||
| 19 | 37 | 18 | 5 | 13 | 29 | 4.5 | Ⅱ | 21 | 7.71×10-9 | 0.04 | 0.57 | ||
| 19 | 37 | 20 | 5 | 15 | 29 | 4.5 | 一 | 一 | Ⅱ | 21 | 7.71×10-9 | 0.04 | 0.57 |
| 23 | 43 | 28 | 6 | 22 | 33 | 4.5 | 8 | 4 | I | 27 | 7.71×10-9 | 0.11 | 0.36 |
| 24 | 44 | 27 | 6 | 21 | 35 | 5.5 | Ⅱ | 26 | 7.71×10-9 | 0.09 | 0.55 | ||
| 24 | 44 | 30 | 6 | 24 | 35 | 5.5 | Ⅱ | 26 | 7.71×10-9 | 0.1 | 0.52 | ||
| 24 | 44 | 34 | 6 | 28 | 35 | 5.5 | Ⅱ | 26 | 7.71×10-9 | 0.12 | 0.56 | ||
| 25 | 47 | 30 | 8 | 22 | 36 | 5.5 | 9.5 | 5.5 | I | 29 | 1.60×10-8 | 0.15 | 0.58 |
| 26 | 46 | 27 | 6 | 21 | 37 | 5.5 | Ⅱ | 28 | 1.60×10-8 | 0.11 | 0.8 | ||
| 28 | 48 | 30 | 6 | 24 | 39 | 5.5 | Ⅱ | 30 | 1.60×10-8 | 0.14 | 0.77 | ||
| 28 | 48 | 33 | 6 | 27 | 39 | 5.5 | Ⅱ | 30 | 1.60×10-8 | 0.15 | 0.76 | ||
| 26 | 48 | 30 | 8 | 22 | 37 | 5.5 | 9.5 | 5.5 | I | 32 | 2.96×10-8 | 0.16 | 0.85 |
| 30 | 54 | 38 | 8 | 30 | 42 | 5.5 | 9.5 | 5.5 | I | 34 | 2.96×10-8 | 0.25 | 1.2 |
